Silicon Thermal Oxide Thickness Calculator


What would you like to do?Where do I start?
Find the oxide thickness, given Time =  HH  : MM  : SS
OR,
Find the required oxidation time, given DESIRED THICKNESS = Å

Initial Oxide:Å

TEMPERATURE:

CRYSTAL ORIENTATION:
<100>     <111>     <110>     poly-Si

AMBIENT:
dry         wet
partial pressure: atm What is Partial Pressure?

Active Dopant Concentration (optional):
p-type         n-type
level: per cc

OPTIONS:What do these options mean?
Use Massoud Model if appropriate
Use Strict Deal-Grove (Legacy code)
Use advanced doping models, if possible

The world is a dangerous place to live, not because of the people who are evil, but because of the people who don't do anything about it. --Albert Einstein

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Calculator Code by Eric Perozziello ©2001-2014. All Rights Reserved.