Film Stress Calculator
Please Note Proper Units!
Substrate thickness:
Micron
Film thickness:
Micron
Curvature before film deposition (+ is concave, - is convex):
Meters
Curvature after deposition:
Meters
Substrate Material:
<100> Si
User Defined
<111> Si
<110> Si
Quartz
Corning 1737
Pyrex 7740
<100> Ge
<111> Ge
<100> GaAs
<111> GaAs
<100> GaP
<111> GaP
MPa
Optional USER PARAMETERS (select "User Defined" above and then enter values below for materials not listed):
Young's Modulus:
GPa
Poisson's Ratio:
Calculator Code by
Eric Perozziello
, ©2001
Derived from C. Storment's Excel implementation of Stoney's Eqn
Assumptions:
Film is thin compared to substrate thickness
