Film Stress Calculator
Please Note Proper Units!
Substrate thickness:
Micron
Film thickness:
Micron
Curvature before film deposition:
Meters
Curvature after deposition:
Meters
Substrate Material:
<100> Si
User Defined
<111> Si
<110> Si
Quartz
Corning 1737
Pyrex 7740
<100> Ge
<111> Ge
<100> GaAs
<111> GaAs
<100> GaP
<111> GaP
<100> InP
MPa
(compressive)
(tensile)
USER PARAMETERS:
Young's Modulus:
GPa
Poisson's Ratio:
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Calculator Code by
Eric Perozziello
, ©2001
Derived from C. Storment's Excel implementation of Stoney's Eqn
Assumptions:
Film is thin compared to substrate thickness
Stress in one direction may couple with stress in another direction (2D/3D not considered)
