Electronic Data Logs

Online, electronic data sheets for the SNF community

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e-DataSheets:Instructions for Data Logs

Enter Data to the Log View the Data in the Log Selected Graph(s) Old data
CVD: TylanBPSG TylanBPSG TylanBPSG graph TylanBPSG old data
TylanNitride TylanNitride TylanNitride graph
TylanPoly TylanPoly TylanPoly graph
ThermcoPoly ThermcoPoly ThermcoPoly graph
Thermal: Thermal Oxidation Thermal Oxidation Thermal Oxide graph
Etch: AMT 8100 AMT 8100 AMT chart
P5000 Etch P5000 Etch
LamPoly LamPoly
PVD: SCT Sputterer SCT Sputterer
more coming soon

Your input is needed:

  • Email me (ericp@snf) to request a logsheet for other equipment
  • Submit your graph (*.pdf) for the selected graph.